|
直径(mm) |
76.2 - 150 |
|
直径公差(mm) |
X±0.2 |
|
导电类型/掺杂剂 |
N型(NTD) |
|
晶向 |
<111>、<100> |
|
电阻率范围(Ω.cm) |
30～1000 |
|
径向电阻率变化(%) |
≤6%or≤8% |
|
氧含量(at cm-3 ) |
≤1×1016 |
|
碳含量(at cm-3 ) |
≤2×1016 |
|
厚度及公差(um) |
根据客户要求 |
|
其他参数 |
按SEMI标准或客户要求 |
Keywords:
FZ-NTD研磨片
FZ-NTD研磨片
研磨片运用领域较广，如光通信领域、微型电机领域、硬盘领域等。
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