Diameter (mm) | 76.2-200 |
Diameter tolerance (mm) | X±0.3 |
Conductivity type/dopant | N-type/P-type |
Crystal orientation | ＜111＞、＜100＞ |
Resistivity range (Ω.cm) | 0.001～70 |
Radial resistivity variation (%) | ≤18% (Five-point probe method) |
Oxygen content (at cm-3 ) | ≤1×1018 |
Carbon content (at cm-3 ) | ≤5×1016 |
Thickness and tolerance (um) | According to customer requirements |
Other parameters | According to SEMI standards or customer requirements |
Keywords:
FZ-NTD Polished Wafer
FZ-NTD Polished Wafer
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